Wolfgang Arden

Linewidth Control In Optical Projection Printing: Influence Of Resist Parameters

Leonhard Mader, Wolfgang Arden, 1985, Advanced Lithography.

Review key challenges

Wolfgang Arden, 2003 .

Lithography trends based on projections of the ITRS (Invited Paper)

Wolfgang Arden, 2005, Other Conferences.

Photolithography overview for 64 megabit production

Wolfgang Arden, D. Coleman, T. Leslie, 1994 .

Physical and technological limits in optimal and X-ray lithography

Wolfgang Arden, Karl-Heinz Muller, 1987 .