Manabu Edamura

Method and apparatus for processing an object in an environment under reduced pressure

Naoyuki Tamura, Youichi Ito, Hiroyuki Shichida, 1994 .

An advanced AFM sensor: its profile accuracy and low probe wear property for high aspect ratio patterns

Masahiro Watanabe, Toshihiko Nakata, Shuichi Baba, 2007, SPIE Advanced Lithography.

Electrification and Hybridization Technologies Applied to Construction Machinery

Manabu Edamura, 2012 .

New inline AFM metrology tool suited for LSI manufacturing at the 45-nm node and beyond

Masahiro Watanabe, Shuichi Baba, Toru Kurenuma, 2007, SPIE Advanced Lithography.

Adoption of Electrification and Hybrid Drive for More Energy-efficient Construction Machinery

Shinya Imura, Manabu Edamura, Seiji Ishida, 2013 .

Three-Dimensional Metrology for CMP process evaluation with In-line Wide-Area Atomic Force Microscope

Toru Kurenuma, Yuichi Kunitomo, Manabu Edamura, 2011 .