Viviana Agudelo

Application of artificial neural networks to compact mask models in optical lithography simulation

Andreas Erdmann, Peter Evanschitzky, Viviana Agudelo, 2013 .

Firefly: an optical lithographic system for the fabrication of holographic security labels

Viviana Agudelo, Jorge Calderón, Oscar Rincón, 2016, Advanced Lithography.

Accuracy and performance of 3D mask models in optical projection lithography

Feng Shao, Andreas Erdmann, Peter Evanschitzky, 2011, Advanced Lithography.

Application of artificial neural networks to compact mask models in optical lithography simulation

Andreas Erdmann, Peter Evanschitzky, Viviana Agudelo, 2013, Advanced Lithography.

Evaluation of various compact mask and imaging models for the efficient simulation of mask topography effects in immersion lithography

Andreas Erdmann, Peter Evanschitzky, Viviana Agudelo, 2012, Advanced Lithography.