Phillip W. Barth

A method of manufacturing a micro-structured valve

Phillip W. Barth, Gary B. Gordon, 1994 .

Microstructured high performance valve nozzle and seat

Phillip W. Barth, Gary B. Gordon, 1994 .

Production-ready silicon microvalve

David Yates, Phillip W. Barth, Gary B. Gordon, 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Silicon sensors meet integrated circuits

Phillip W. Barth, 1990 .

Ultra-stable, high-temperature pressure sensors using silicon fusion bonding

Kurt E. Petersen, Janusz Bryzek, J. R. Mallon, 1990 .