Jiantai Dou

EUV multilayer defects reconstruction based on the transport of intensity equation and partial least-square regression

Zhishan Gao, Jun Ma, Jiantai Dou, 2017, Other Conferences.

A robust white-light interference signal leakage sampling correction method based on wavelet transform

Zhongming Yang, Xin Lei, Zhaojun Liu, 2020 .