T. Kallfass

Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching

T. Kallfass, T. Kallfass, 1979 .

High voltage thin film transistors manufactured with photolithography and with Ta2O5 as the gate oxide

E. Lueder, T. Kallfass, E. Lueder, 1979 .