Chris Haidinyak

Applications using 2D contact CDSEM images

Chris Haidinyak, Cyrus E. Tabery, 2004, SPIE Photomask Technology.

Electrically testable CMP characterization vehicle for DFM, process transfer, and process development

Chris Haidinyak, Brandon Ward, Julie Segal, 2008, 2008 International Symposium on Semiconductor Manufacturing (ISSM).