Wolfram Dotzel

Model building, control design and practical implementation of a high precision high dynamical MEMS acceleration sensor (Invited Paper)

Karla Hiller, Jan Mehner, Thomas Gessner, 2005, SPIE Microtechnologies.

Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement

Karla Hiller, Thomas Gessner, Detlef Billep, 2005, SPIE Microtechnologies.