Steven Douglas Slonaker

Influence of laser spatial parameters and illuminator pupil-fill performance on the lithographic performance of a scanner

Stephen P. Renwick, Ivan Lalovic, Steven Douglas Slonaker, 2002, SPIE Advanced Lithography.

Pupil-fill imperfections and their effect on lithography

Stephen P. Renwick, Steven Douglas Slonaker, 2003, SPIE Advanced Lithography.

Lithographic imaging-driven pattern edge placement errors at 10nm node

Stephen P. Renwick, Jacek K. Tyminski, Julia A. Sakamoto, 2016, Advanced Lithography.