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Acceleration sensor using SOI wafer with honeycomb insulator

Kensuke Kanda, Takayuki Fujita, Kazusuke Maenaka, 2012, 2012 IEEE International Conference on Systems, Man, and Cybernetics (SMC).

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Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer

Kensuke Kanda, Takayuki Fujita, Kazusuke Maenaka, 2012, 2012 Fifth International Conference on Emerging Trends in Engineering and Technology.

2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012

Tetsushi Wakabayashi, Tomomoto Ishikawa, Thomas Schmickl, 2012, ICETET.