R. Gras

Sputter-deposited lubricant thin films for high-temperature applications

C. Zimmermann, Y. Pauleau, N. Maréchal, 1996 .

300 mm Multi Level Air Gap Integration for Edge Interconnect Technologies and Specific High Performance Applications

V. Arnal, L. Pain, A. Farcy, 2008, 2008 International Interconnect Technology Conference.

Cu surface treatment influence on Si adsorption properties of CuSiN self-aligned barriers for sub-65nm technology node

S. Chhun, J. Michelon, L. Pinzelli, 2006 .

Integration of multi-level self-aligned CoWP barrier compatible with high performance BEOL

S. Chhun, M. Mellier, S. Jullian, 2006, 2006 International Interconnect Technology Conference.