Wilfried Lerch

Reflow process optimization for micro-bumps applications in 3D technology

Eric Beyne, Erik Jan Marinissen, Andy Miller, 2014, Proceedings of the 5th Electronics System-integration Technology Conference (ESTC).

Advanced activation of ultra-shallow junctions using flash-assisted RTP

Peter Pichler, J. Gelpey, Silke Paul, 2005 .

Implant Annealing – An Evolution from Soak over Spike to Millisecond Annealing

Silke Paul, Wilfried Lerch, 2008 .

Distribution and segregation of arsenic at the SiO2/Si interface

Heiner Ryssel, Peter Pichler, Wolfgang Windl, 2008 .

An Overview of ms Annealing for Deep Sub-Micron Activation

Steve McCoy, J. Gelpey, Wilfried Lerch, 2008 .

New methods of metrology data analysis during semiconductor processing and application to rapid thermal processing

Wilfried Lerch, Manuela Boin, 1998 .

Experimental investigations and simulation of the deactivation of arsenic during thermal processes after activation by SPER and spike annealing

H. Kheyrandish, Clement Tavernier, Peter Pichler, 2008 .

Temperature Measurement in Rapid Thermal Processing with Focus on the Application to Flash Lamp Annealing

Wolfgang Skorupa, D. Reichel, Wilfried Lerch, 2011 .