Tomohiro Suzuki

EUV actinic blank inspection: from prototype to production

Hidehiro Watanabe, Anna Tchikoulaeva, Hiroki Miyai, 2013, Advanced Lithography.

Improvement of defect mitigation with EUV actinic blank inspection prototype for 16 nm hp

Tsuyoshi Amano, Hiroki Miyai, Tomohiro Suzuki, 2014, Advanced Lithography.

Effectiveness of extreme ultraviolet actinic blank inspection prototype for 16-nm half-pitch for mitigation of multilayered defects

Tsuyoshi Amano, Hiroki Miyai, Tomohiro Suzuki, 2014 .

Advances in the detection capability on actinic blank inspection

Noriaki Takagi, Hidehiro Watanabe, Tsuyoshi Amano, 2016, SPIE Advanced Lithography.

Actinic patterned mask defect inspection for EUV lithography

Hiroki Miyai, Tomohiro Suzuki, Haruhiko Kusunose, 2019, Photomask Technology.