Sunao Ioku

发表

Study of Ni-W alloy as a MEMS Material

Takayuki Fujita, Kazusuke Maenaka, Hidehiro Ikeda, 1999 .

Time Shared Driving and Detection System for Micro Vibratory Gyroscope with Single Vibration Coil

Kazusuke Maenaka, Yoichiro Takayama, Sunao Ioku, 2004 .

Quantitative Analysis and Influence of CO2 Absorbed in TMAH Solution for Silicon Etching

Takayuki Fujita, Kazusuke Maenaka, Yoichiro Takayama, 2003 .

Design, fabrication and operation of MEMS gimbal gyroscope☆

Takayuki Fujita, Kazusuke Maenaka, Yoichiro Takayama, 2005 .