Hwan-seok Seo

Printability and inspectability of defects on the EUV mask for sub-32nm half pitch HVM application

Iacopo Mochi, Sungmin Huh, Han-Ku Cho, 2011, Advanced Lithography.

Printability and inspectability of defects on EUV blank for 2xnm hp HVM application

Sungmin Huh, Jihoon Na, Jonggul Doh, 2012, Advanced Lithography.