Heui-Jae Pahk

New method of thin-film thickness measurement in wavelength scanning interferometry

Y. M. Hwang, J. S. Lee, Heui-Jae Pahk, 2008, International Symposium on Precision Mechanical Measurements.

In-line Critical Dimension Measurement System Development of LCD Pattern Proposed by Newly Developed Edge Detection Algorithm

Sung-Hoon Park, Heui-Jae Pahk, Jeong-Ho Lee, 2013 .

Development of AOI(Automatic Optical Inspection) System for Defect Inspection of Patterned TFT-LCD Panels Using Adjacent Pattern Comparison and Border Expansion Algorithms

Heui-Jae Pahk, Myung-Sun Lee, Sung-Bum Kang, 2008 .

Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography

Sung-Hoon Park, Heui-Jae Pahk, Jeong-Ho Lee, 2014, J. Electronic Imaging.

Thermal Error Measurement and Real Time Compensation System for the CNC Machine Tools Incorporating the Spindle Thermal Error and the Feed Axis Thermal Error

Heui-Jae Pahk, S. W. Lee, 2002 .

Development of the precision planar motor stage using a new magnet array and robust control with the parametric uncertainty model

Heui-Jae Pahk, Hyun-Jang Shin, 2007 .

New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor

Jung-Hwan Kim, Heui-Jae Pahk, Sung-Won Yoon, 2008 .

Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels

Jun-Hee Moon, Heui-Jae Pahk, Tai-Wook Kim, 2012, J. Electronic Imaging.