H. Betz

Influence Of Sputter Effects On The Resolution In X-Ray Mask Repair

N. P. Economou, A. Heuberger, H. Betz, 1986, Advanced Lithography.

X-Ray Lithography Using Synchrotron Radiation And Ion-Beam Shadow Printing

H. Betz, A. Heuberger, 1983, Advanced Lithography.

Computer simulations of resist profiles in x‐ray lithography

A. Heuberger, H. Betz, S. Pongratz, 1981 .

The influence of photoelectrons and fluorescent radiation on resolution in X-ray lithography

A. Heuberger, H. Betz, J. Chlebek, 1987 .

Radiation damage effects in boron nitride mask membranes subjected to x‐ray exposures

Roland A. Levy, Arnold W. Yanof, W. A. Johnson, 1987 .

Resolution limits in x‐ray lithography calculated by means of x‐ray lithography simulator XMAS

A. Heuberger, H. Betz, H. Oertel, 1986 .

Heating and temperature‐induced distortions of silicon x‐ray masks

A. Heuberger, H. Betz, K. Heinrich, 1983 .