Shuichiro Ohara

OPC care-area feedforwarding to MPC

Xiaolong Zhang, Stanislas Baron, Yi Zou, 2016, Photomask Technology.

Manufacturing challenges for curvilinear masks

Stanislas Baron, Chris Spence, Been-Der Chen, 2017, Photomask Technology.

MDP challenges from a software provider's perspective

Shuichiro Ohara, 2014, Photomask Technology.

Study of data I/O performance on distributed disk system in mask data preparation

Tomoyuki Chikanaga, Masakazu Hamaji, Shuichiro Ohara, 2010, Photomask Technology.

Affordable and process window increasing full chip ILT masks

David Kim, Guangming Xiao, Isao Aburatani, 2010, Photomask Technology.