T. Parrill

Introducing the NV-GSD-HE3, a new high energy implanter

M. Sugitani, M. Tsukihara, S. Takei, 1999, 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144).

On the FinFET extension implant energy

T. Parrill, Leonard M. Rubin, Aditya Agarwal, 2003 .

UV curing and photoresist outgassing in high energy implantation

T. Parrill, Yuri Erokhin, S. Slater, 1996, Proceedings of 11th International Conference on Ion Implantation Technology.