Akihiro Ikeda

Mass-production fabrication of miniaturized plastic chip devices for biochemical applications

Reiji Hattori, Yukinori Kuroki, Shinichi Etoh, 2004, SPIE Micro + Nano Materials, Devices, and Applications.

Increased doping depth of Al in wet-chemical laser doping of 4H-SiC by expanding laser pulse

Tanemasa Asano, Hiroshi Ikenoue, Akihiro Ikeda, 2017 .

Al doping of 4H-SiC by laser irradiation to coated Al film and its application to junction barrier Schottky diode

Tanemasa Asano, Hiroshi Ikenoue, Akihiro Ikeda, 2015 .

Fabrication of Open-Top Microchannel Plate Using Deep X-Ray Exposure Mask Made with Silicon On Insulator Substrate

Reiji Hattori, Yukinori Kuroki, Tsuyoshi Fujimura, 2003 .

Trap assisted leakage current conduction in thin silicon oxynitride films grown by rapid thermal oxidation combined microwave excited plasma nitridation

Reiji Hattori, Yukinori Kuroki, Akihiro Ikeda, 2003 .

Effects of post annealing on removal of defect states in silicon oxynitride films grown by oxidation of silicon substrates nitrided in inductively coupled nitrogen plasma

Reiji Hattori, Yukinori Kuroki, Akihiro Ikeda, 2003 .

Film Density Dependence of Polymethylmethacrylate Ablation under Synchrotron Radiation Irradiation

Reiji Hattori, Yukinori Kuroki, Tsuyoshi Fujimura, 2001 .