Christopher L. Borst

450 mm carrier interoperability effects on particle Generation

Angelo Alaestante, Christopher L. Borst, 2014, 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).

Estimation of number of PGV for a 450mm fab: FA: Factory automation

Christopher L. Borst, Chih-Wei Huang, 2016, 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

Overview of IC Interconnects

Ronald J. Gutmann, William N. Gill, Christopher L. Borst, 2002 .

Three-Dimensional Chemical Mechanical Planarization Slurry Flow Model Based on Lubrication Theory

Ronald J. Gutmann, Donald W. Schwendeman, William N. Gill, 2001 .

Pad porosity, compressibility and slurry delivery effects in chemical- mechanical planarization: modeling and experiments

Ronald J. Gutmann, Donald W. Schwendeman, William N. Gill, 2000 .

Surface Kinetics Model for SiLK Chemical Mechanical Polishing

Ronald J. Gutmann, William N. Gill, Christopher L. Borst, 2002 .

Challenges and Rewards of Low-Abrasive Copper CMP: Evaluation and Integration for Single-Damascene Cu/Low-k Interconnects for the 90nm Node

Christopher L. Borst, Stanley Monroe Smith, Mona M. Eissa, 2004 .