Thierry Verdot

Novel architecture of MEMS microphone that employs deflecting micro beams and piezoresistive nano gauges

H. Lhermet, Arnaud Walther, Jean-Louis Guyader, 2014 .

Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices

Manuel Collet, Paul Muralt, Thierry Verdot, 2007 .

Novel architecture of MEMS microphone with piezoresistive nano gauges detection

Jean-Louis Guyader, Kerem Ege, Jaroslaw Czarny, 2015 .

Micro PA detector: pushing the limits of mid IR photoacoustic spectroscopy integrated on silicon

H. Lhermet, Thierry Verdot, Audrey Berthelot, 2020, OPTO.

Resilience to Vibration of a Tuning Fork MEMS Gyroscope

Guillaume Jourdan, Patrice Rey, Thierry Verdot, 2016 .

Microphone with planar nano-gauge detection: fluid-structure coupling including thermoviscous effects

Kerem Ege, Jaroslaw Czarny, Thierry Verdot, 2016 .

First microphones based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges

Thierry Verdot, Brigitte Desloges, Audrey Berthelot, 2018, 2018 IEEE Micro Electro Mechanical Systems (MEMS).

Micro-Photoacoustic Cell with Integrated Microphone for Sub-Ppm Gas Sensing

Maryse Fournier, Thierry Verdot, Brigitte Desloges, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

New planar nano-gauge detection microphone: Analytical and numerical acoustic modeling

Arnaud Walther, Jean-Louis Guyader, Kerem Ege, 2013 .