Sherry L. Baker

Smoothing of diamond-turned substrates for extreme-ultraviolet lithography illuminators

Regina Soufli, Eberhard Spiller, Eric M. Gullikson, 2004, SPIE Optics + Photonics.

Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory

Regina Soufli, Leon Golub, Benjawan Kjornrattanawanich, 2005, SPIE Optics + Photonics.

Substrate smoothing for high-temperature condenser operation in EUVL source environments

Regina Soufli, Eberhard Spiller, Eric M. Gullikson, 2005, SPIE Advanced Lithography.

Multilayer optics for an extreme-ultraviolet lithography tool with 70-nm resolution

Regina Soufli, Stanley Mrowka, Claude Montcalm, 2001, SPIE Advanced Lithography.