V. Rajaraman

Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology

E. Cretu, V. Rajaraman, I. Sabageh, 2011 .

Robust Wafer-Level Thin-Film Encapsulation of Microstructures using Low Stress PECVD Silicon Carbide

V. Rajaraman, P.M. Sarro, H.T.M. Pham, 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.