Hsin Chang

A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

Hiroshi Toshiyoshi, Ming C. Wu, Sophia Huang, 2002, Optical Fiber Communication Conference and Exhibit.

Characterization of critical dimension uniformity through in-situ detection of aerial images in a scanner

Yu Cao, Jeng-Horng Chen, Stefan Hunsche, 2006, SPIE Advanced Lithography.