Richard C. Svrluga

Mitigation of EUV mask blank substrate pit and scratch defects by Accelerated Neutral Atom Beam (ANAB) processing

Frank Goodwin, Michael J. Walsh, Dave Balachandran, 2014, Advanced Lithography.

Surface damage correction, and atomic level smoothing of optics by Accelerated Neutral Atom Beam (ANAB) Processing

Michael J. Walsh, Sean R. Kirkpatrick, Richard C. Svrluga, 2014, Laser Damage.

Improved laser damage threshold performance of calcium fluoride optical surfaces via Accelerated Neutral Atom Beam (ANAB) processing

Michael J. Walsh, Sean R. Kirkpatrick, Richard C. Svrluga, 2015, SPIE Laser Damage.

Investigation of accelerated neutral atom beams created from gas cluster ion beams

Joseph Khoury, Sean R. Kirkpatrick, Richard C. Svrluga, 2013 .

Impact of gas cluster ion and accelerated neutral atom beam surface treatments on the laser-induced damage threshold of ceramic Yb:YAG

Richard C. Svrluga, T. Butcher, P. Phillips, 2017 .

Enhanced bioactivity and osseointegration of PEEK with accelerated neutral atom beam technology.

Richard C. Svrluga, M. Assad, J. Khoury, 2017, Journal of biomedical materials research. Part B, Applied biomaterials.

Neutral atom beam technique enhances bioactivity of PEEK

Richard C. Svrluga, A. Kirkpatrick, J. Khoury, 2013 .