Heng-Chung Chang

Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (1 1 1) silicon substrate

Weileun Fang, Julius Ming-Lin Tsai, Heng-Chung Chang, 2006 .

A novel stress isolation guard ring design for the improvement of three-axis piezoresistive accelerometer

Weileun Fang, Chao-Lin Cheng, Heng-Chung Chang, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

Method for performance improvement and size shrinkage of a three-axis piezoresistive accelerometer with guard-ring structure

Weileun Fang, Chao-Lin Cheng, Heng-Chung Chang, 2012, 2012 IEEE Sensors.

Method for sensitivity improvement and optimal design of a piezoresistive pressure sensor

Weileun Fang, Chia-Pao Hsu, Heng-Chung Chang, 2010, 2010 IEEE Sensors.

A Novel 3-DOF Micromanipulator

Weileun Fang, Julius Ming-Lin Tsai, Heng-Chung Chang, 2003 .

Development of a CMOS MEMS pressure sensor with a mechanical force-displacement transduction structure

Weileun Fang, Chao-Lin Cheng, Heng-Chung Chang, 2015 .

A reliable test key for thin film mechanical properties characterization

Weileun Fang, Heng-Chung Chang, Hsin-Chang Tsai, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Magnetostrictive type inductive sensing pressure sensor

Weileun Fang, Jung-Hung Wen, Heng-Chung Chang, 2016 .

Mechanical force-displacement transduction structure for performance enhancement of CMOS-MEMS pressure sensor

Weileun Fang, Chao-Lin Cheng, Heng-Chung Chang, 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).