Paul Alkemade

Assessing the Impact of a Highly-Cited Paper

Paul Alkemade, 2019, ISSI.

Advanced defect classification by smart sampling, based on sub-wavelength anisotropic scatterometry

Paul Alkemade, Diederik Maas, Peter van der Walle, 2018, Advanced Lithography.

Nanofabrication with a helium ion microscope

Paul Alkemade, Ping Chen, Diederik Maas, 2010, Advanced Lithography.

Local stress analysis on semiconductor devices by combined experimental-numerical procedure

Willem D. van Driel, Paul Alkemade, Rene Kregting, 2011, Microelectron. Reliab..