Yueh-Chuan Lee

发表

Selective SiO2-xFx growth with liquid-phase deposition for MEMS technology

Ching-Fa Yeh, Yueh-Chuan Lee, Jwinn-Lein Su, 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Smart dielectrics of fluorinated silicon glass prepared by liquid phase deposition method

Chien-Hung Liu, Tien-Fu Chen, Shyue-Shyh Lin, 2001, SPIE Micro + Nano Materials, Devices, and Applications.

Novel Sidewall Capping for Degradation-Free Damascene Trenches of Low-Permittivity Methylsilsesquioxane

Ching-Fa Yeh, Yueh-Chuan Lee, Yuh-Ching Su, 2000 .

Comprehensive Investigation on Fluorosilicate Glass Prepared by Temperature‐Difference‐Based Liquid‐Phase Deposition

Ching-Fa Yeh, Yueh-Chuan Lee, Yuh-Ching Su, 2000 .