H. Seppa

Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

J. Kiihamaki, A. Oja, I. Tittonen, 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

A bulk micromachined silicon angular rate sensor

H. Seppa, S. Ruotsalainen, T. Ryhanen, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).