Daniel Kandel

发表

Differential signal scatterometry overlay metrology: an accuracy investigation

Vladimir Levinski, Mike Adel, Pavel Izikson, 2007, SPIE Optical Metrology.

Scanner focus metrology for advanced node scanner monitoring and control

DongSub Choi, Vladimir Levinski, Kwang-Sub Yoon, 2015, Advanced Lithography.

CURRENT-INDUCED STEP BENDING INSTABILITY ON VICINAL SURFACES

John D. Weeks, Daniel Kandel, Da-Jiang Liu, 1998 .

PROFILE OF A DECAYING CRYSTALLINE CONE

Navot Israeli, Daniel Kandel, 1999 .