Hao-Chih Liu

TEM validation of CD AFM image reconstruction: part II

Gregory A. Dahlen, Hao-Chih Liu, Marc Osborn, 2008, SPIE Advanced Lithography.

TEM validation of CD AFM image reconstruction

Gregory A. Dahlen, Hao-Chih Liu, Marc Osborn, 2007, SPIE Advanced Lithography.

Shaver with thermoelectric rasierhilfsmittelabgabesystem and process to deliver a shaving aid

Ye Tao, Hao-Chih Liu, Raymond Guimont, 2003 .

Advanced CD-AFM probe tip shape characterization for metrology accuracy and throughput

Gregory A. Dahlen, Hao-Chih Liu, Marc Osborn, 2007, SPIE Advanced Lithography.

Recent CD AFM probe developments for sub-45 nm technology nodes

Gregory A. Dahlen, Hao-Chih Liu, Jason R. Osborne, 2008, SPIE Advanced Lithography.