Ryosuke Kizu

Comparison of SEM and AFM performances for LER reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020, Advanced Lithography.

Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020, Journal of Micro/Nanolithography, MEMS, and MOEMS.

Re-Evaluation of Calibration and Measurement Capabilities of Pitch Calibration Systems Designed by Using the Diffraction Method

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2017, Int. J. Autom. Technol..

Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2019, Advanced Lithography.

Line edge roughness measurement on vertical sidewall for reference metrology using a metrological tilting atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020, Journal of Micro/Nanolithography, MEMS, and MOEMS.

Evaluating SEM-based LER metrology using a metrological tilting-AFM

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2021, Advanced Lithography.

Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2018 .

Extension of the range of profile surface roughness measurements using metrological atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2019, Precision Engineering.

Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2018, Measurement Science and Technology.