Ichiko Misumi

发表

Comparison of SEM and AFM performances for LER reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020, Advanced Lithography.

Novel CD-SEM calibration reference patterned by EB cell projection lithography

Ichiko Misumi, Tomizo Kurosawa, Takeshi Mizuno, 2005, SPIE Advanced Lithography.

Pixel length calibration using a pattern matching method for secondary-electron images

Ichiko Misumi, Satoshi Gonda, Kentaro Sugawara, 2013, Other Conferences.

Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020, Journal of Micro/Nanolithography, MEMS, and MOEMS.

Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM

Kiyoshi Takamasu, Ichiko Misumi, Yasushi Azuma, 2006 .

Re-Evaluation of Calibration and Measurement Capabilities of Pitch Calibration Systems Designed by Using the Diffraction Method

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2017, Int. J. Autom. Technol..

Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2019, Advanced Lithography.

Development of photomask linewidth measurement and calibration using AFM and SEM in NMIJ

Ichiko Misumi, Satoshi Gonda, Osamu Sato, 2011, Defense + Commercial Sensing.

Recent activity of international comparison for nanoparticle size measurement

Ichiko Misumi, Satoshi Gonda, Kentaro Sugawara, 2014, Other Conferences.

Line edge roughness measurement on vertical sidewall for reference metrology using a metrological tilting atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020 .

Evaluating SEM-based LER metrology using a metrological tilting-AFM

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2021, Advanced Lithography.

Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

Osamu Sato, Ichiko Misumi, Qiangxian Huang, 2006 .

Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales

Ichiko Misumi, Qiangxian Huang, Satoshi Gonda, 2005 .

Final report on Supplementary Comparison APMP.L-S2: Bilateral comparison on pitch measurements of nanometric lateral scales (50 nm and 100 nm) between NMIJ/AIST (Japan) and PTB (Germany)

Ichiko Misumi, Gaoliang Dai, Gwo-Sheng Peng, 2007 .

25 nm pitch comparison between a traceable x-ray diffractometer and a metrological atomic force microscope

Ichiko Misumi, Yasushi Azuma, Satoshi Gonda, 2011 .

Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope

Kiyoshi Takamasu, Ichiko Misumi, Satoshi Gonda, 2003 .

Impacts of probe-tip tilt on scanning probe microscopy

Ichiko Misumi, Satoshi Gonda, Fumio Mizuno, 2004 .

Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system.

Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa, 2005, Applied optics.

Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

Kiyoshi Takamasu, Ichiko Misumi, Satoshi Gonda, 2003 .

Comparing measurements of 1D-grating samples using optical diffraction technique, CD-SEM and nanometrological AFM

Kiyoshi Takamasu, Ichiko Misumi, Satoshi Gonda, 2002 .

Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems.

Ichiko Misumi, Qiangxian Huang, Satoshi Gonda, 2004, Applied optics.

Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2018 .

The interference effect in an optical beam deflection detection system of a dynamic mode AFM

Osamu Sato, Ichiko Misumi, Qiangxian Huang, 2006 .

Nanometric lateral scale development with Si/SiO2 multilayer thin-film structures and improvement of uncertainty evaluation using analysis of variance

Ichiko Misumi, Satoshi Gonda, Hideyuki Tanaka, 2008 .

Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers

Osamu Sato, Toshiyuki Takatsuji, Ichiko Misumi, 2006 .

Round-robin measurements of 100- and 60-nm scales among a deep-ultraviolet laser diffractometer, a scanning electron microscope and various atomic force microscopes

Osamu Sato, Ichiko Misumi, Satoshi Gonda, 2007 .

Bilateral comparison of 25 nm pitch nanometric lateral scales for metrological scanning probe microscopes

Osamu Sato, Toshiyuki Takatsuji, Ichiko Misumi, 2010 .

Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes

Osamu Sato, Ichiko Misumi, Satoshi Gonda, 2008 .

Extension of the range of profile surface roughness measurements using metrological atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2019, Precision Engineering.

Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2018, Measurement Science and Technology.

Application of a GaAs/InGaP superlattice in nanometric lateral scales

Osamu Sato, Toshiyuki Takatsuji, Ichiko Misumi, 2007 .