Akiko Hirai

发表

Comparison of SEM and AFM performances for LER reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020, Advanced Lithography.

High-sensitivity surface measurements by a heterodyne white-light interferometer

Akiko Hirai, Hirokazu Matsumoto, 1999, Other Conferences.

Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020, Journal of Micro/Nanolithography, MEMS, and MOEMS.

Multichannel spectral imaging system consisting of dichroic mirrors

Akiko Hirai, 1996, International Commission for Optics.

Progress in deep broadband interferometric nulling with the adaptive nuller

Akiko Hirai, Oliver P. Lay, Robert D. Peters, 2008, Astronomical Telescopes + Instrumentation.

3-D surface profile measurement by 2-D heterodyne low-coherence interferometer

Akiko Hirai, Hirokazu Matsumoto, 2003, International Commission for Optics.

Adaptive nulling with a deformable mirror in the near-IR

Akiko Hirai, Oliver P. Lay, Robert D. Peters, 2005, SPIE Optics + Photonics.

Past and present of the Japanese prototype of metre

Akiko Hirai, 2015 .

Gauge block interferometer using three frequency-stabilized lasers

Akiko Hirai, Youichi Bitou, Feng-Lei Hong, 2001, Lasers in Metrology and Art Conservation.

Near-IR demonstration of adaptive nuller based on deformable mirror

Akiko Hirai, Oliver P. Lay, Robert D. Peters, 2004, SPIE Astronomical Telescopes + Instrumentation.

Adaptive nulling for the Terrestrial Planet Finder Interferometer

Akiko Hirai, Oliver P. Lay, Robert D. Peters, 2006, SPIE Astronomical Telescopes + Instrumentation.

Novel heterodyne Fourier transform spectrometer for the NIR region

Akiko Hirai, Hirokazu Matsumoto, Dejiao Lin, 2003, International Commission for Optics.

Re-Evaluation of Calibration and Measurement Capabilities of Pitch Calibration Systems Designed by Using the Diffraction Method

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2017, Int. J. Autom. Technol..

Low-coherence tandem interferometer for in-situ measurement of the refractive index

Akiko Hirai, Hirokazu Matsumoto, 2001, Optical Engineering for Sensing and Nanotechnology.

Adaptive nulling in the mid-IR for the Terrestrial Planet Finder interferometer

Akiko Hirai, Oliver P. Lay, Robert D. Peters, 2007, SPIE Optical Engineering + Applications.

Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2019, Advanced Lithography.

A new heterodyne tandem-interferometer for fully interferometric three-dimensional imaging spectrometry

Akiko Hirai, Kyu Yoshimori, Tetsuya Hashimoto, 2013, International Conference on Photonics Solutions.

Low-coherence tandem interferometer for remote calibration of gauge blocks

Akiko Hirai, Hirokazu Matsumoto, 2003, SPIE Optics + Photonics.

New remote length measurements with optical fiber using a low-coherence tandem interferometer

Akiko Hirai, Hirokazu Matsumoto, 2003, International Commission for Optics.

Line edge roughness measurement on vertical sidewall for reference metrology using a metrological tilting atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2020 .

Evaluating SEM-based LER metrology using a metrological tilting-AFM

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2021, Advanced Lithography.

Evaluation of long-term stability of low thermal expansion coefficient materials using gauge block interferometers

Akiko Hirai, Youichi Bitou, Y. Bitou, 2018 .

A heterodyne interferometer constructed in an integrated optics and its metrological evaluation of a picometre-order periodic error

Akiko Hirai, Shuko Yokoyama, Yasuaki Hori, 2018, Precision Engineering.

White-light interferometry using pseudo random-modulation for high-sensitivity and high-selectivity measurements

Akiko Hirai, Hirokazu Matsumoto, H. Matsumoto, 1999 .

Absolute measurement of gauge block without wringing using tandem low-coherence interferometry

Kiyoshi Takamasu, Akiko Hirai, Hirokazu Matsumoto, 2012 .

A white-light interferometer using a lamp source and heterodyne detection with acousto-optic modulators

Akiko Hirai, Hirokazu Matsumoto, 1999 .

Remote Calibration of Length Standards Using 47-km-Long Optical Fiber Network

Akiko Hirai, Hirokazu Matsumoto, Kaoru Sasaki, 2005 .

A two-color heterodyne interferometer for measuring the refractive index of air using an optical diffraction grating

Akiko Hirai, Shigeo Iwasaki, Hirokazu Matsumoto, 2002 .

Multichannel Spectral Imaging System for Measurements with the Highest Signal-to-Noise Ratio

Akiko Hirai, Kazuyoshi Itoh, Yoshiki Ichioka, 1997 .

Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2018 .

Remote calibration of end standards using a low-coherence tandem interferometer with an optical fiber

Akiko Hirai, Hirokazu Matsumoto, H. Matsumoto, 2003 .

KEY COMPARISON: APMP.L-K1: Calibration of gauge blocks by interferometry: Final Report

Akiko Hirai, Hirokazu Matsumoto, Sitian Gao, 2006 .

Measurement of group refractive index wavelength dependence using a low-coherence tandem interferometer.

Akiko Hirai, Hirokazu Matsumoto, 2006, Applied optics.

Interferometric spectral imaging of liquid in laser ablation

Akiko Hirai, Kazuyoshi Itoh, Yasuyuki Tsuboi, 1996 .

High-sensitivity surface-profile measurements by heterodyne white-light interferometer

Akiko Hirai, Hirokazu Matsumoto, 2001 .

Low-coherence tandem interferometer for measurement of group refractive index without knowledge of the thickness of the test sample.

Akiko Hirai, Hirokazu Matsumoto, 2003, Optics letters.

Extension of the range of profile surface roughness measurements using metrological atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2019, Precision Engineering.

Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2018, Measurement Science and Technology.