C. J. Spanos

Computer integrated manufacturing (semiconductor processing)

D. A. Hodges, L. A. Rowe, C. J. Spanos, 1989, Proceedings. Seventh IEEE/CHMT International Electronic Manufacturing Technology Symposium,.

Statistical data pre-processing for fuzzy modeling of semiconductor manufacturing process

C. J. Spanos, R. L. Chen, 1993, Third International Conference on Industrial Fuzzy Control and Intelligent Systems.

Equipment Analysis And Wafer Parameter Prediction Using Real-Time Tool Data

C. J. Spanos, S. F. Lee, 1994, International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM.