Martin E. Mastovich
发表
Susan Redmond,
Roger McKay,
Mary Mellard,
2002,
SPIE Advanced Lithography.
Martin E. Mastovich,
David K. Astolfi,
Neal T. Sullivan,
2000,
Advanced Lithography.
Investigation of full-field CD control of sub-100-nm gate features by phase-shift 248-nm lithography
Martin E. Mastovich,
David K. Astolfi,
Neal T. Sullivan,
2001,
SPIE Advanced Lithography.
Martin E. Mastovich,
Neal T. Sullivan,
Robert Brandom,
2003,
SPIE Advanced Lithography.
Martin E. Mastovich,
David C. Joy,
Neal T. Sullivan,
2001,
SPIE Advanced Lithography.
Martin E. Mastovich,
Mario Reybrouck,
Paul C. Knutrud,
2003,
SPIE Advanced Lithography.
Martin E. Mastovich,
Paul C. Knutrud,
Anastasia Tyurina,
1999,
Advanced Lithography.
Yasutaka Morikawa,
Naoya Hayashi,
Martin E. Mastovich,
2004,
SPIE Advanced Lithography.
Martin E. Mastovich,
Ganesh Sundaram,
Robert Brandom,
2003,
SPIE Advanced Lithography.
Martin E. Mastovich,
Pascal Fabre,
Benjamin D. Bunday,
2003,
SPIE Advanced Lithography.
Martin E. Mastovich,
Ronald G. Dixson,
Benjamin Bunday,
2003
.