So Ito

发表

C017 Design and Testing of a Four-Probe Sensor Head For a Mosaic Grating Surface Encoder

Wei Gao, Yuki Shimizu, Takeshi Ito, 2013 .

Eccentric Error Compensation for Pitch Deviation Measurement of Gears

Wei Gao, Yuki Shimizu, So Ito, 2012 .

Design and construction of the motion mechanism of an XY micro-stage for precision positioning

Wei Gao, Tien-Fu Lu, So Ito, 2013 .

Self-evaluation of the cutting edge contour of a microdiamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe

Shu Wang, Wei Gao, So Ito, 2015 .

Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite

Jung Chul Lee, Wei Gao, Yuki Shimizu, 2013 .

Modeling and analysis of a scanning electrostatic force microscope for surface profile measurement

Zhigang Jia, Wei Gao, So Ito, 2013, Other Conferences.

D031 Self-Evaluation of Tool Edge Contour of a Single Point Diamond Tool on a Force-Controlled Fast Tool Servo

Wei Gao, Yuki Shimizu, So Ito, 2013 .

A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits

Kazuhiko Takahashi, Wei Gao, So Ito, 2016 .

Precision measurement of Z-slide vertical error motion of an ultra-precision lathe by using three-probe method

Jung Chul Lee, Wei Gao, Chun Hong Park, 2017 .

Self-calibration and compensation of setting errors for surface profile measurement of a microstructured roll workpiece

Wei Gao, Yuki Shimizu, So Ito, 2014 .

Measurement and deposition of nanometer-scale Cu dot using an atomic force microscope with a nanopipette probe in liquid condition

Koji Yamazaki, Futoshi Iwata, So Ito, 2011, International Symposium on Precision Engineering Measurement and Instrumentation.

Fabrication of diffraction gratings for surface encoders by using a Lloyd’s mirror interferometer with a 405 nm laser diode

Wei Gao, Yuki Shimizu, So Ito, 2013, Other Conferences.

Improvement of an Air-Bearing Displacement Sensor with Nanometric Resolution

Wei Gao, Yuki Shimizu, So Ito, 2012 .

Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography

Xinghui Li, Wei Gao, Yuki Shimizu, 2015, International Conference on Optical and Photonic Engineering.

A Micro-Stage for Linear-Rotary Positioning

Wei Gao, Yuki Shimizu, So Ito, 2012 .

Construction and verification of a linear-rotary microstage with a millimeter-scale range

Wei Gao, So Ito, Yuxin Peng, 2013 .

Design of a laser autocollimator-based optical sensor with a rangefinder for error correction of precision slide guideways

Wei Gao, Yuki Shimizu, So Ito, 2015 .

Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder

Wei Gao, Yuki Shimizu, Takeshi Ito, 2014 .

C019 Investigation and reduction of crosstalk errors in a six-degree-of-freedom surface encoder for a planar motion stage

Wei Gao, Songyi Dian, So Ito, 2013 .

Precision tool setting for fabrication of a microstructure array

Wei Gao, Young-Jin Noh, Yuki Shimizu, 2013 .

An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor

Wei Gao, Yuki Shimizu, So Ito, 2015 .

Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric

Zhigang Jia, Wei Gao, Yuki Shimizu, 2013, Precision Mechanical Measurements.

Dynamic Response of an Air-Bearing Displacement Sensor for on-Machine Surface Form Measurement

Yuki Shimizu, So Ito, Wei Gao, 2012 .

Surface form metrology of micro-optics

Wei Gao, Zhigang Jia, Yuki Shimizu, 2013, Other Conferences.

Pitch deviation measurement of an involute spur gear by a rotary profiling system

Wei Gao, Yuki Shimizu, So Ito, 2015 .

Measurement Technologies for Manufacturing

Jung Chul Lee, Wei Gao, Yuki Shimizu, 2019 .

An edge reversal method for precision measurement of cutting edge radius of single point diamond tools

Wei Gao, Yuki Shimizu, So Ito, 2017 .

A Micro-ball Tapping Probe for Form Measurement of Micro-structured Surface

Wei Gao, Yuki Shimizu, So Ito, 2013 .

Development of an optical probe for evaluation of tool edge geometry

Wei Gao, Yuki Shimizu, So Ito, 2014 .

Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo

Wei Gao, Yuki Shimizu, So Ito, 2017 .

A noncontact scanning electrostatic force microscope for surface profile measurement

Wei Gao, Yuki Shimizu, So Ito, 2012 .

Surface profile measurement of internal micro-structures

Wei Gao, Yuki Shimizu, So Ito, 2013 .

On-machine form measurement of high precision ceramics parts by using a laser displacement sensor

Wei Gao, Yuki Shimizu, So Ito, 2014 .

Design and Test of a Three-Axis Mosaic Surface Encoder

Wei Gao, Yuki Shimizu, Koji Hosono, 2012 .

Design and Experiment of Thermal Contact Sensor Detecting Defects on Si Wafer Surface

Yuki Shimizu, So Ito, Wei Gao, 2012 .

An optical lever by using a mode-locked laser for angle measurement

Wei Gao, Yuki Shimizu, So Ito, 2017 .

Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes

Wei Gao, Yuki Shimizu, So Ito, 2013 .

A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

Wei Gao, Yuki Shimizu, So Ito, 2014 .

Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection

Wei Gao, So Ito, Issei Kodama, 2014 .

Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions.

Wei Gao, Yuki Shimizu, So Ito, 2016, Optics express.

B003 Design of a stylus displacement sensor with a low measuring force

Akira Kato, Yuki Shimizu, So Ito, 2013 .

Cutting Edge Height Measurement of a Rotary Cutting Tool by a Laser Displacement Sensor

Akira Kato, Yuki Shimizu, So Ito, 2012 .

A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage

Wei Gao, Songyi Dian, Yuki Shimizu, 2013 .

Characterization of electrostatic force for scanning electrostatic force microscopy of micro-structured surface

Zhigang Jia, Wei Gao, Yuki Shimizu, 2013 .

Three-axis vibration measurement by using a grating-interferometric vibrometer

Wei Gao, Yuki Shimizu, So Ito, 2014 .

Surface Form Measurement and Analysis of a Cylindrical Workpiece with Microstructures

Wei Gao, Yuki Shimizu, So Ito, 2012 .

A Cr-N thin film displacement sensor for precision positioning of a micro-stage

Yuki Shimizu, So Ito, Yuxin Peng, 2014 .

Form Error Characterization of Reflective-Type Gratings

Wei Gao, Yuki Shimizu, So Ito, 2012 .

Measurement of Cutting Edge Width of a Rotary Cutting Tool by Using a Laser Displacement Sensor

Wei Gao, Akira Kato, Yuki Shimizu, 2014, Int. J. Autom. Technol..

A micro optical probe for edge contour evaluation of diamond cutting tools

Wei Gao, Yuki Shimizu, So Ito, 2014 .

Mode-locked laser autocollimator with an expanded measurement range.

Wei Gao, Yuki Shimizu, So Ito, 2016, Optics express.

A Three-Axis Angle Sensor with a Linear Encoder Scale Reflector

Yuki Shimizu, So Ito, Taiji Maruyama, 2017 .

Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer.

Wei Gao, Yuki Shimizu, So Ito, 2016, Optics express.