Eric C. Mattson

Role of excess ligand and effect of thermal treatment in hybrid inorganic-organic EUV resists

Yves J. Chabal, Eric C. Mattson, Sara M. Rupich, 2018, Advanced Lithography.

Indium-doped SnO2 nanoparticle–graphene nanohybrids: simple one-pot synthesis and their selective detection of NO2

Junhong Chen, Carol J. Hirschmugl, Eric C. Mattson, 2013 .

Multi-beam synchrotron infrared chemical imaging with high spatial resolution: Beamline realization and first reports on image restoration

Carol J. Hirschmugl, Michael J. Nasse, Ruben Reininger, 2011 .

Chemical Modification Mechanisms in Hybrid Hafnium Oxo-methacrylate Nanocluster Photoresists for Extreme Ultraviolet Patterning

Mathew D. Halls, Hans A. Bechtel, Thomas J. Mustard, 2018, Chemistry of Materials.