Roger Alvis

High-volume process monitoring of FEOL 22nm FinFET structures using an automated STEM

Michael A. Strauss, Ozan Ugurlu, Gavin Dutrow, 2013, Advanced Lithography.

Online characterization of HSG polysilicon by AFM

Larry M. Ge, Roger Alvis, L. Hendrix, 1999, Advanced Lithography.

High-Throughput, Site-Specific TEM Sample Preparation of Sub-20nm Thick Lamella for Process Metrology and Failure Analysis

Roger Alvis, 2012 .

Atom Probe Tomography of Electronic Materials

Brian P. Gorman, David J. Larson, Jesse D. Olson, 2007 .

Review of Atom Probe FIB-Based Specimen Preparation Methods

Michael K Miller, K. F. Russell, Roger Alvis, 2007, Microscopy and Microanalysis.