N. A. Dyuzhev

Maskless nanolithography on the basis of microfocus x-ray tubes: conversion of electron energy into the BeKα line

G. D. Demin, M. A. Makhiboroda, N. I. Chkhalo, 2019, International Conference on Micro- and Nano-Electronics.

Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices

E. E. Gusev, D. M. Migunov, N. A. Dyuzhev, 2017, Nanotechnologies in Russia.

Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes

N. A. Dyuzhev, N. Salashchenko, N. Chkhalo, 2018, Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques.

Possibilities and Limitations of CMOS Technology for the Production of Various Microelectronic Systems and Devices

N. A. Dyuzhev, V. Bespalov, V. Kireev, 2022, Nanobiotechnology Reports.

Vacuum Nanoelectronics Based on Semiconductor Field-Emission Structures: Current State and Development Prospects. Review

N. A. Dyuzhev, I. D. Evsikov, 2023, Semiconductors.