Daniel Benoit

Integrated SiN on SOI dual photonic devices for advanced datacom solutions

Charles Baudot, Frédéric Boeuf, Daniel Benedikovic, 2018, Photonics Europe.

A comparison of the mechanical stability of silicon nitride films deposited with various techniques

Pierre Morin, Daniel Benoit, Remi Beneyton, 2012 .

Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensors

Pierre Morin, Daniel Benoit, Jorge Regolini, 2007 .

Elastic properties of tensile nitrogen-plasma-treated multilayer silicon nitride films

F. Volpi, Muriel Braccini, Daniel Benoit, 2014 .

Effects of Silicon Nitride Passivation Layer on Mean Dark Current and Quantum Efficiency of CMOS Active Pixel Sensors

Pierre Morin, Daniel Benoit, Jorge Regolini, 2005 .