S. Linder

IGCT-a new emerging technology for high power, low cost inverters

P.K. Steimer, S. Klaka, J. Werninger, 1997, IAS '97. Conference Record of the 1997 IEEE Industry Applications Conference Thirty-Second IAS Annual Meeting.

Photolithography in anisotropically etched grooves

H. Baltes, E. Doering, S. Linder, 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers

H. Baltes, E. Doering, S. Linder, 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.