Takashi Yunogami

Deposition Process of Aluminum Thin Films by Intense Pulsed Light Ion-Beam Evaporation

Kiyoshi Yatsui, Hideki Kawahara, Weihua Jiang, 2003 .

The theory of process architecture in semiconductor industry: the development of semiconductors production process flow in R&D center and fab

Yoshiji Suzuki, 隆 湯之上, Takashi Yunogami, 2008 .