S. R. Chilton

Use of on-product measurements for process control for improved manufacturing efficiency and reduced costs

R. G. Cosway, M. G. Ridens, M. Peters, 1996, IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.

Implementation of a test wafer inventory tracking system to increase efficiency in monitor wafer usage

S. R. Chilton, S. B. Popovich, B. Kilgore, 1997, 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings.