Rebekah A. Derryberry

High-index immersion fluids enabling cost-effective single-exposure lithography for 32 nm half pitches

Eric Hendrickx, Roger H. French, Hoang V. Tran, 2008, SPIE Advanced Lithography.

High Refractive Index Fluid Evaluations at 193 nm : Technical Paper Fluid Lifetime and Fluid / Resist Interaction Studies

Eric Hendrickx, Roger H. French, Frieda Van Roey, 2008 .