Xu Xie

Using air as the nonlinear media for THz wave generation

Xu Xie, Jianming Dai, Masashi Yamaguchi, 2006, SPIE Defense + Commercial Sensing.

Model-based scanner tuning for process optimization

Xu Xie, Yu Cao, Venu Vellanki, 2011, European Mask and Lithography Conference.

Simulation-based pattern matching using scanner metrology and design data to reduce reliance on CD metrology

Anton Devilliers, Junwei Lu, Xu Xie, 2010, Advanced Lithography.

Improved model predictability by machine data in computational lithography and application to laser bandwidth tuning

Xu Xie, Qian Zhao, Paul van Adrichem, 2009, Advanced Lithography.

Simulation-based scanner tuning using FlexRay capability and scatterometry

Xu Xie, Rolf Seltmann, Paul van Adrichem, 2011, Advanced Lithography.

Improved fab CDU with FlexRay and LithoTuner

Xu Xie, Youri van Dommelen, Robert Socha, 2011, Advanced Lithography.