Johan Haemers

A Monte Carlo simulation of the erosion profile of a rotating cylindrical magnetron

G. Buyle, Jan Musschoot, Diederik Depla, 2006 .

Understanding the discharge voltage behavior during reactive sputtering of oxides

Johan Haemers, D. Depla, R. D. Gryse, 2007 .

Thirty years of rotatable magnetrons

Wouter Leroy, Johan Haemers, Diederik Depla, 2012 .

Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide

S. Van den Berghe, Christophe Detavernier, Jan Musschoot, 2009 .

Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation

G. Buyle, Jan Musschoot, Johan Haemers, 2006 .