Denis G. Raskin

Capabilities of microinterferometer with digital recording of images for studying micro-objects with sub-nanometer resolution

N. I. Chkhalo, Denis G. Raskin, N. N. Salashchenko, 2008, International Conference on Micro- and Nano-Electronics.

Correction of the EUV mirror substrate shape by ion beam

N. I. Chkhalo, A. E. Pestov, N. N. Salashchenko, 2008, International Conference on Micro- and Nano-Electronics.

Manufacturing and investigation of objective lens for ultrahigh resolution lithography facilities

N. I. Chkhalo, E. B. Kluenkov, M. N. Toropov, 2008, International Conference on Micro- and Nano-Electronics.

A new source of a reference spherical wave for a point diffraction interferometer

N. I. Chkhalo, N. N. Salashchenko, M. N. Toropov, 2008, International Conference on Micro- and Nano-Electronics.

Testing and correction of optical elements with subnanometer precision

E. B. Kluyenkov, Denis G. Raskin, N. Salashchenko, 2008 .

Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

N. I. Chkhalo, N. N. Salashchenko, Vladimir N. Polkovnikov, 2009 .