N. Kouma

A multi-chip directly mounted 512 MEMS mirror array module with hermetically sealed package for large optical cross-connects

J. Mi, O. Tsuboi, H. Soneda, 2005, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005..

A 2-axis comb-driven micromirror array for 3D MEMS switches

S. Ueda, O. Tsuboi, H. Soneda, 2002, IEEE/LEOS International Conference on Optical MEMs.

Fishbone-shaped vertical comb actuator for dual-axis 1D analog micromirror array

S. Ueda, O. Tsuboi, H. Soneda, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning

S. Ueda, O. Tsuboi, H. Soneda, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.